It is discovered that the scattering increases as the micro-roughness increases or autocovariance width decreases.

随著粗糙度的增加、自相关长度的减小，软X射线掠入射光散射越来越严重。

The incidence face side of the claviform lens is used as a front end, and inserted into the first cylinder and fixed.

以棒形透镜的入射面一侧作为前端，将插入1体中，然后将固定。

With convolution integral, a new formulation for describing the relation of soft X-ray reflectivity of multilayer with the different energy Monochromaticity of incident light is deduced.

利用数分,理论上推导出一个在入射光不同单色性下精确计算多层膜反射率的公式。